Work

Strategy to optimize the development, use, and dimension of test structures to control defect appearance in backend process steps

Year: 2002

Type: conference-paper

Source: ASMC proceedings

DOI: 10.1109/asmc.1994.588276

Author: C. Hess

Institution: Karlsruhe Institute of Technology

Language: English

Topic: VLSI and Analog Circuit Testing

Subfield: Hardware and Architecture

Field: Computer Science

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W1644695985

FWCI: 0.797

Cites: 17

Cited by: 6

Related to: 10