Work

Comparative materials characterization of SOI wafers produced by competing technologies

Year: 2002

Type: conference-paper

Source: IEEE International SOI Conference (SOI)

DOI: 10.1109/soi.1993.344603

Authors: D. Feijoo, A.P. Mills, A.R. Kortan, J.B. Sapjeta, C.M. Hsieh, G.E. Carver

Institution: AT&T (United States)

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1842259271

FWCI:

Cites: 2

Cited by: 2

Related to: 10