The diffusion of antimony in heavily doped and n- and p-type silicon
Year: 1986
Type: article
Authors: R.B. Fair, M.L. Manda, J.J. Wortman
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1990844860
