Work

Fabrication of cantilever probes with integrated piezoresistive read-out and built-in piezoelectric actuators

Year: 2005

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.591024

Authors: Steve Olson, Bruce Altemus, Balasubramanian Sankaran, Natalya Tokranova, Robert Geer, James Castracane, Bai Xu

Institution: University at Albany, State University of New York

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Foundation

OpenAlex ID: W1992244623

FWCI:

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