Work

Quantum electron beam probe of sidewall dry-etch damage

Year: 2000

Type: article

Source: Microelectronic Engineering

DOI: 10.1016/s0167-9317(00)00336-1

Authors: M. Rahman, J.G. Williamson, K. Mathieson, G. Dick, M.J. Brown, S. Duffy, C.D.W. Wilkinson

Institution: University of Glasgow

Language: English

Topic: Electron and X-Ray Spectroscopy Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: Engineering and Physical Sciences Research Council

OpenAlex ID: W1993155740

FWCI: 0.281

Cites: 11

Cited by: 1

Related to: 10