Work

Characterization of membrane curvature in micromachined silicon accelerometers and gyroscopes using optical interferometry

Year: 1996

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.251238

Authors: Jeffrey T. Borenstein, Paul Greiff, Jerome B. Sohn, Marc S. Weinberg

Institution: Draper Laboratory

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Charles Stark Draper Laboratory

OpenAlex ID: W2004150160

FWCI: 5.799

Cites: 2

Cited by: 9

Related to: 10