Two-dimensional fluid approach to the dc magnetron discharge
Work
Year: 2005
Type: article
Abstract: A two-dimensional (r, z) time-dependent fluid model was developed and used to describe a dc planar magnetron discharge with cylindrical symmetry. The transport description of the charged species uses ... more
Authors C. Costin, L. Marques, G. Popa, G. Gousset
Institutions Alexandru Ioan Cuza University, Laboratoire de Physique des Gaz et des Plasmas, Université Paris-Sud, University of Minho
Cites: 51
Cited by: 59
Related to: 10
FWCI: 4.108
Citation percentile (by year/subfield): 94.21
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Sustainable Development Goal Affordable and clean energy
Open Access status: green