A MOCVD reactor safety system for a production environment
Year: 1984
Type: article
Source: Journal of Crystal Growth
Authors: Eric Johnson, R. Tsui, D. Convey, N. Mellen, J. Curless
Institution: Motorola (United States)
Language: English
Topic: Industrial and Mining Safety
Subfield: Safety, Risk, Reliability and Quality
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2014245214