Fabrication of nanostructures with long-range order using block copolymer lithography
Year: 2002
Type: article
Source: Applied Physics Letters
DOI: 10.1063/1.1519356
Institutions: Massachusetts Institute of Technology, University of Twente
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2020001809