A Static Model for Scratches Generated during Aluminum Chemical-Mechanical Polishing Process: Orbital Technology
Year: 1999
Type: article
Abstract: In this work, we explored the analogy between the scratches formed on a polished surface and the indentation used in the material hardness testing. A static hardness model proposed on the basis of this analogy is able to explain quite successfully the experimental results such as the depth of the scratches and the vulnerability of the aluminum film, under the assumption that the particle penetration is facilitated by a stress concentration. It is suggested that the stress redistribution needed might be caused by the incompleteness of pad-wafer contact due to the pad surface roughness. We also found that a scratch in its plane-view is shaped by the kinetic equation governing the pad-wafer relative movement, which is deemed as a further evidence for our hypothesis that a scratch is generated by a protrusion on the pad holding a particle against the wafer and forcing it into the film with the aid of the stress concentration.
DOI: 10.1143/jjap.38.1932
Institution: IMEC
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W2034643192