Work

Multi-level overlay techniques for improving DPL overlay control

Year: 2012

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.915711

Authors: Charlie Chen, Y. C. Pai, Dennis Yu, Peter Pang, Chun Chi Yu, Robert (Hsing-Chien) Wu, Eros (Chien Jen) Huang, Marson (Chiun-Chieh) Chen, David Tien, Dongsub Choi

Institutions: United Microelectronics (Taiwan), KLA (United States)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2036442823

FWCI: 1.225

Cites: 1

Cited by: 6

Related to: 10