Ion kinetic-energy distributions in argon rf glow discharges
Work
Year: 1992
Type: article
Source: Journal of Applied Physics
Institutions National Institute of Standards and Technology, Institute of Physics of the Slovak Academy of Sciences
Cites: 26
Cited by: 40
Related to: 10
FWCI: 4.743
Citation percentile (by year/subfield): 89.65
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Sustainable Development Goal Affordable and clean energy
Open Access status: closed