Work

Characterization of Slurry System and Suppression of Oxide Erosion in Aluminum CMP (Chemical-Mechanical Planarization)

Year: 1999

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-566-115

Authors: Lei Zhong, Jerry Yang, Karey Holland, Joost Grillaert, Katia Devriend, Nancy Heylen, Marc Meuris

Institution: IMEC

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2065593083

FWCI:

Cites: 2

Cited by:

Related to: 10