Micromachining inertial instruments
Year: 1996
Type: conference-paper
DOI: 10.1117/12.251201
Authors: Marc S. Weinberg, Jonathan J. Bernstein, Jeffrey T. Borenstein, J. Campbell, J. Cousens, Robert K. Cunningham, R. Fields, Paul Greiff, Brenda Hugh, Les Niles, Jerome B. Sohn
Institution: Draper Laboratory
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Charles Stark Draper Laboratory
OpenAlex ID: W2088624854