Work

Ellipsometric determination of optical constants for silicon and thermally grown silicon dioxide via a multi-sample, multi-wavelength, multi-angle investigation

Year: 1998

Type: article

Source: Journal of Applied Physics

DOI: 10.1063/1.367101

Authors: C. M. Herzinger, B. Johs, W. A. McGahan, J. A. Woollam, W. Paulson

Institutions: J.A. Woollam Company (United States), Motorola (United States)

Language: English

Topic: Optical Polarization and Ellipsometry

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2094285478

FWCI: 9.032

Cites: 27

Cited by: 1,107

Related to: 10