Work

The HARPSS process for fabrication of nano-precision silicon electromechanical resonators

Year: 2002

Type: conference-paper

Source: IEEE Conference on Nanotechnology (IEEE NANO)

DOI: 10.1109/nano.2001.966472

Authors: Seong Yoel No, F. Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Georgia Institute of Technology

OpenAlex ID: W2131815251

FWCI: 1.778

Cites: 13

Cited by: 14

Related to: 10