Fabrication of MEMS Devices with Macroporous Silicon Membrane Embedded with Modulated 3D Structures for Optimal Cell Sorting
Year: 2002
Type: article
Source: MRS Proceedings
Institution: University at Albany, State University of New York
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2144312562
