Work

A Comparison of Low Energy BF2 Implantation in Si and Ge Preamorphized Silicon

Year: 1988

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-128-611

Authors: Gary A. Ruggles, Shin-Nam Hong, Jimmie J. Wortman, Mehmet Ozturk, Edward R. Myers, John J. Hren, Richard B. Fair

Institutions: North Carolina State University, MCNC Research and Development Institute

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Semiconductor Research Corporation

OpenAlex ID: W2145628928

FWCI: 1.562

Cites: 5

Cited by: 10

Related to: 10