Work

Low Energy Electron Microscopy for Semiconductor Applications

Year: 2008

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-1088-w03-01

Authors: Marian Mankos, Vassil Spasov, Liqun Han, Shinichi Kojima, Ximan Jiang, Salam Harb, Luca Grella, Cory Czarnik

Institution: KLA (United States)

Language: English

Topic: Electron and X-Ray Spectroscopy Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funders: National Institute of Standards and Technology, Defense Advanced Research Projects Agency

OpenAlex ID: W2145775181

FWCI: 0.171

Cites: 7

Cited by: 2

Related to: 10