Work

Influence of air pressure on resonating and thermoelectric microstructures realized with standard IC technologies

Year: 2002

Type: conference-paper

Source: Technical digest - International Electron Devices Meeting/Technical digest

DOI: 10.1109/iedm.1993.347243

Authors: O. Brand, R. Lenggenhager, H. Baltes

Institution: ETH Zurich

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2542127090

FWCI: 0.711

Cites: 5

Cited by: 7

Related to: 10