Work

The key technologies in silicon based microwave and RF MEMS device fabrication

Year: 2005

Type: conference-paper

Source: International Conference on Microwave and Millimeter Wave Technology (ICMMT)

DOI: 10.1109/icmmt.2004.1411436

Authors: Zewon Liu, Xiaofeng Lei, YunXuan, Jia Wei, Zhongmin Chen, Litian Liu, Zhijian Li

Institution: Tsinghua University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W2546546679

FWCI: 0.55

Cites: 9

Cited by: 3

Related to: 10