Work

Self-consistent Monte Carlo simulations of plasma processing reactors

Year: 1991

Type: article

Source: Illinois Digital Environment for Access to Learning and Scholarship (University of Illinois at Urbana-Champaign)

Author: Yilin Weng

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2594118362

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Related to: 10