Lithographic stochastics: beyond 3σ
Year: 2017
Type: conference-paper
DOI: 10.1117/12.2264046
Authors: Robert L. Bristol, Marie E. Krysak
Institution: Intel (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2600924476