Multi-wavelength approach towards on-product overlay accuracy and robustness
Year: 2018
Type: conference-paper
DOI: 10.1117/12.2297420
Authors: Guo-Tsai Huang, Cathy Wang, Kai-Hsiung Chen, Kaustuve Bhattacharyya, Marc Noot, Hammer Chang, Sax Liao, Ken Chang, Benny Gosali, Eason Su, Arie den Boef, Christophe Fouquet, Kevin Cheng, John Lin
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2793679295