Work

Development of counter-facing discharge device for extreme ultraviolet source. Control of current waveform and its effects on the plasma dynamics

Year: 2017

Type: article

Authors: Tomoaki Kawasaki, Kouki Kanou, Mitsuo Nakajima, Kazuhiko Horioka, Daisuke Nishii, Tatsuya Sodekoda, Hajime Kuwabara

Institutions: Tokyo Institute of Technology, IHI Corporation (Japan)

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3189174813

FWCI:

Cites: 6

Cited by:

Related to: 10