Low-Coupling Hybrid Parallel-Serial-Kinematic Nanopositioner with Nonorthogonal Flexure: Nonlinear Design and Control
Year: 2021
Type: article
Institutions: University of Utah, Boston University, Villanova University
Language: English
Subfield: Control and Systems Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G3822864514, G7191953882, G929662672
OpenAlex ID: W4205556889
