Monte Carlo simulation of the electron beam scattering under gas mixtures in an HPSEM at low energy
Year: 2010
Type: article
Source: HAL
Authors: Mansour, O., AIDAOUI, K., KADOUN, A.-E., Khouchaf, L., Mathieu, C.
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4206862718
