Monte Carlo simulation of the electron beam scattering under gas mixtures environment in an HPSEM at low energy
Year: 2009
Type: article
Source: Vacuum
Authors: Mansour, O., AIDAOUI, K., KADOUN, A.-E., Khouchaf, L., Mathieu, C.
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4297940606
