Work

Controlled placement of an individual carbon nanotube onto a microelectromechanical structure

Year: 2002

Type: article

Abstract: We report on the precise placement of a single carbon nanotube (CNT) onto a microlectromechanial system (MEMS) structure. Using a hybrid atomic force microscope/scanning electron microscope (AFM/SEM) system, an individual multiwalled CNT was retrieved from a cartridge by the AFM tip, translated to a MEMS device, and then placed across a gap between an actuating and a stationary structure. Progress toward a resistance versus stress/strain measurement on a CNT will be discussed, including SEM images of a MEMS structure we have designed specifically for such a measurement.

Source: Applied Physics Letters

DOI: 10.1063/1.1467701

Authors: P. A. Williams, S. J. Papadakis, M. R. Falvo, A. M. Patel, M. Sinclair, A. Seeger, A. Helser, R. M. Taylor, S. Washburn, R. Superfine

Institutions: University of North Carolina at Chapel Hill, Microsoft (United States)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W2072291101

FWCI: 9.805

Cites: 18

Cited by: 122

Related to: 10