Work

In-cycle evolution of thickness and roughness parameters during oxygen plasma enhanced ZnO atomic layer deposition using in situ spectroscopic ellipsometry

Year: 2024

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/6.0003830

Authors: Yousra Traouli, Ufuk Kilic, Sema G. Kilic, Matthew Hilfiker, Daniel Schmidt, Stefan Schoeche, Eva Schubert, Mathias Schubert

Institutions: University of Nebraska–Lincoln, IBM (United States), J.A. Woollam Company (United States), Lund University, NanoLund

Language: English

Topic: ZnO doping and properties

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Air Force Office of Scientific Research

Awards: The influence of doping and annealing onto the lattice dynamics, band structure and free charge carrier properties in monoclinic gallium aluminum oxide semiconductor alloys, G2971774010, G441682718, Semiconductor-based Terahertz Traveling Wave Amplifiers for Monolithic Integration, G585296059, NSF-DFG: Advances in Ion-Surface Interaction-Driven Manufacturing of One-Dimensional Metal Oxide Heterostructures, RII Track-1: Emergent Quantum Materials and Technologies (EQUATE)

OpenAlex ID: W4402313566

FWCI: 0.189

Cites: 92

Cited by: 2

Related to: 10