Work

BEoL Varactors Based on HfO2/ZrO2 Superlattice for mmWave Applications

Year: 2024

Type: conference-paper

DOI: 10.1109/esserc62670.2024.10719442

Authors: Sukhrob Abdulazhanov, Quang Huy Le, David Lehninger, Ayse Sünbül, Thomas Kämpfe, Gerald Gerlach

Institutions: Fraunhofer Institute for Photonic Microsystems, Center Nanoelectronic Technologies, Technische Universität Dresden

Language: English

Topic: Ferroelectric and Negative Capacitance Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403678199

FWCI: 1.612

Cites: 20

Cited by: 2

Related to: 10