The Impact of Varying TEM Accelerating Voltage on Elemental Analysis of Semiconductor Defects
Year: 2024
Type: conference-paper
Authors: Jacob Levenson, Swaminathan Subramanian, Khiem Ly, Tony Chrastecky, Eric Yi
Institutions: NXP (Germany), NXP (United States)
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4403685954