Work

Microwave Characterization of HfO2/ZrO2 superlattice MFM varactors integrated into BEoL

Year: 2024

Type: conference-paper

DOI: 10.1109/uffc-js60046.2024.10794127

Authors: Sukhrob Abdulazhanov, Quang Huy Le, David Lehninger, Ayse Sünbül, Thomas Kämpfe, Gerald Gerlach

Institutions: Fraunhofer Institute for Photonic Microsystems, Center Nanoelectronic Technologies, Technische Universität Dresden

Language: English

Topic: Ferroelectric and Negative Capacitance Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405521870

FWCI:

Cites: 17

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Related to: 10