Work

Tomography of Three-Layer Structures in Scanning Electron Microscopy in the Backscattered Electron Detection Mode

Year: 2024

Type: article

Source: Moscow University Physics Bulletin

DOI: 10.3103/s0027134924701868

Authors: A. A. Borzunov, E. I. Rau, S. V. Zaitsev, N. A. Koshev, D. V. Lukyanenko, A. G. Yagola

Institutions: Lomonosov Moscow State University, Skolkovo Institute of Science and Technology

Language: English

Topic: Electron and X-Ray Spectroscopy Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4406534114

FWCI:

Cites: 36

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Related to: 10