Work

Aspect ratio and height estimation in critical dimension scanning electron microscope metrology using deep learning combined with features of proximity effect

Year: 2025

Type: article

Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI: 10.1116/6.0004025

Authors: Delong Chen, Qingmao Zhang, Zhuming Liu

Institutions: South China Normal University, Guangdong Academy of Sciences

Language: English

Topic: Electron and X-Ray Spectroscopy Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funders: Natural Science Foundation of Guangdong Province, National Key Research and Development Program of China, Special Project for Research and Development in Key areas of Guangdong Province

Awards: G2768070718, G3063037287, G843871211

OpenAlex ID: W4407350245

FWCI: 0.205

Cites: 25

Cited by: 1

Related to: 10