A comprehensive cross-layer overlay prediction method with reticle heating for enhanced process optimization
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3050426
Authors: Qiqi Zhang, Yueh-Feng Lu, Chao-Jen Tsou, Onur Demirer, Robin Maximilian Zech, Mengsyun Li, Martin Freitag, Birnstein Norman, Chengshuai Li, Kaotsai Tsai
Institutions: Winbond (Taiwan), KLA (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4407833244