Accelerating particle root-cause analysis for cleanliness validation of critical parts and tool surfaces by combining the best of scatterometry and SEM-EDS
Year: 2025
Type: conference-abstract
DOI: 10.1117/12.3059312
Authors: Dennis de Graaff, Maarten Bouwman, Stefano Esposito, Bart Dirkx, Hans Arts, Paula Vena, Wouter Arts
Institution: Thermo Fisher Scientific (Netherlands)
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4407833431