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Investigating Overlay Control Towards 2.5/3D System Integration in Backend Lithography Processes

Year: 2024

Type: conference-paper

Source: IEEE Electronics Packaging Technology Conference (EPTC)

DOI: 10.1109/eptc62800.2024.10909854

Authors: Chia-Ching Huang, Yutai Lee, Yuan-Chang Lee, Peter van der Krieken, Liang-Chuan Chang, Jeroen De Boeij, Sylvain I. Misat, Hsiang-Hung Chang, Michiel van der Stam

Institutions: Onto Innovation (United States), Industrial Technology Research Institute

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4408325599

FWCI:

Cites: 4

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Related to: 10