Work

Vectorial microscanning mirror with integrated position sensor for fast beam steering of a compact therapeutic laser

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3043782

Authors: Thilo Sandner, Thomas Graßhoff, Markus Schwarzenberg, Klemens Birnbaum, Tino Pügner

Institution: Fraunhofer Institute for Photonic Microsystems

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4408601775

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