Work

Towards the modeling and control of a quasi-static 2D-MEMS vector scanner with a hybrid-integrated moving magnet drive

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3042702

Authors: Klemens Birnbaum, Benjamin Mustin, Julius Schneider, Thilo Sandner

Institutions: Fraunhofer Institute for Photonic Microsystems, Technische Universität Dresden

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4408601922

FWCI:

Cites: 2

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Related to: 10