Integrated 512x320 micro mirror array with novel lever-type piston-tip-tilt actuator
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3042188
Authors: Andreas Gehner, Dirk Rudloff, Sebastian Döring, Andreas Neudert, Alexander Mai, Mario Nitzsche, Peter Dürr
Institution: Fraunhofer Institute for Photonic Microsystems
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4408602138