Mass production adoption of EUV pellicle: methodology for evaluation and validation
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3049378
Authors: Mun Ja Kim, Seongju Wi, Yunhan Lee, Byunghoon Lee, Sukjong Bae, In-Yong Kang, Jin Choi, Sang-Hee Lee, Gwanghyun Ahn, Jin Jeon, Soyeon Jin, Jae-Hee Kim, Gyubaek Lee
Institution: Samsung Electronics (South Korea)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409655278