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Deep learning outperforms RCWA for multimodal measurement of high-aspect-ratio nanostructures

Year: 2025

Type: conference-paper

Source: SPIE Applications of Machine Learning

DOI: 10.1117/12.3065924

Authors: Shiva Mudide, Nick Keller, George A. Antonelli, Mariel Shapiro, Alexander R. Bruccoleri, Ralf K. Heilmann, Mark L. Schattenburg

Institutions: Massachusetts Institute of Technology, Onto Innovation (United States), Princeton University

Language: English

Topic: Optical Polarization and Ellipsometry

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4414265241

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