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Measuring Chemical Shifts with Energy-Dispersive X-Ray Spectroscopy

Year: 2025
Type: article
Abstract: Electron microscopy uses energy-dispersive x-ray spectroscopy (EDS) and electron energy loss spectroscopy (EELS) for elemental analysis. EDS and EELS energy resolutions are commonly between 30 and 100 eV or 0.01 and 1 eV, respectively. Large solid angle EDS detector technology has increased collection efficiency to enable precision spectroscopy via averaging of 0.02-0.1 eV. This improved precision gives access to chemical shifts; examples are shown in compounds of Al, Ti, and W. EDS can now detect chemical information in a complementary parameter space (accelerating voltage, thickness, atomic number) to that covered by EELS.
DOI: 10.1103/t1rs-7kr2
Authors: Yueyun Chen, Rebekah Jin, Yarin Heffes, Brian Zutter, Tristan P. O’Neill, Jared J. Lodico, B. C. Regan, Matthew Mecklenburg
Language: English
Open Access status: green
Funders: National Science Foundation, Semiconductor Research Corporation, University of Southern California, Thermo Fisher Scientific, University of California, Los Angeles, California NanoSystems Institute
OpenAlex ID: W4414955325
FWCI: 0.204
Cites: 41
Cited by: 1
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