Work

Quasi insitu XPS investigation of the wet chemical functionalization of Indium phosphide InP surfaces: application to microelectronics processes

Year: 2025

Type: conference-paper

Source: HAL (Le Centre pour la Communication Scientifique Directe)

Authors: Al Hoyek, G., Lumineau, V., Loup, V., Pelissier, B.

Institutions: Commissariat à l'Énergie Atomique et aux Énergies Alternatives, CEA Grenoble, Laboratoire des Technologies de la Microélectronique, Laboratoire d'Électronique des Technologies de l'Information

Language: English

Topic: Electron and X-Ray Spectroscopy Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7124385631

FWCI:

Cites:

Cited by:

Related to: