Study on Si-contamination in Developable BARC (DBARC) in High-K Metal Gate Process
Year: 2026
Type: conference-paper
Source: ASMC proceedings
Authors: Wu Wenbin, Zhang Lei, Li Xiaojing, Fu Yong Feng
Institution: GlobalFoundries (Singapore)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W7164151748