Work

Location-Controlled Ge Grain Growth via Nanoscale Cooling-Hole-Assi-sted Laser Crystallization for Low-Thermal-Budget Monolithic 3D Integration

Year: 2026

Type: article

Source: ACS Applied Nano Materials

DOI: 10.1021/acsanm.6c05048

Authors: Yu-Ming Pan, Huan-Yu Chiu, Hao-Tung Chung, Nien-Chih Lin, Chih-Chao Yang, Chang-Hong Shen, Kuan-Neng Chen

Institution: National Yang Ming Chiao Tung University

Language: English

Topic: 3D IC and TSV technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7225733638

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Cites: 27

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