Author

Takehisa Nakayama

OpenAlex ID: A5000408199

Relationship between Plasma Parameters and Carbon Atom Coordination in a-C:H Films Prepared by RF Glow Discharge Decomposition

1988 · Kenji Yamamoto, Yosuke Ichikawa, et al. · Japanese Journal of Applied Physics · 24

Physical properties and structure of carbon-rich a-SiC:H films prepared by r.f. glow discharge decomposition

1989 · Kenji Yamamoto, Yosuke Ichikawa, et al. · Thin Solid Films · 20

Works count: 2

Citation count: 44

H-index: 2

I10-index: 2