Work

Physical properties and structure of carbon-rich a-SiC:H films prepared by r.f. glow discharge decomposition

Year: 1989

Type: article

Source: Thin Solid Films

DOI: 10.1016/0040-6090(89)90141-7

Authors: Kenji Yamamoto, Yosuke Ichikawa, Noboru Fukada, Takehisa Nakayama, Yoshihisa Tawada

Language: English

Topic: Diamond and Carbon-based Materials Research

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2070164938

FWCI: 2.171

Cites: 19

Cited by: 20

Related to: 10