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Katsuharu Imai

OpenAlex ID: A5000801356
Multi-cusp ion source for Gen 5.5 doping system
2012 · Yutaka Inouchi, Takeshi Matsumoto, et al. · AIP conference proceedings · 5
NISSIN iG5 implantation tool for generation 5.5 in the flat panel display industry
2012 · Takeshi Matsumoto, Katsuharu Imai, et al. · AIP conference proceedings · 5
Works count: 2
Citation count: 10
H-index: 2
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